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This device is a mass spectrometer that uses ion cyclotron resonance(ICR). In measurement, ionized samples are subjected to cyclotron motion in a high magnetic field, and confined within an ICR cell. Then, the resonance signal obtained by exposing them to a radio-wave pulse is Fourier transformed. This device produces a resolution from one to several hundred thousands, and its high sensitivity gives it the capacity to measure even pmol-fmol order samples.
Injected samples were ionized, drawn into the coil center and circulated to some period depending on the molecular weight. |
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Nuclear magnetic resonance (NMR, 750MHz) system was worked under the high-powered superconductor. A lot of information on the chemical structure can be obtained using this system even if the sample has a low mobility. |
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This system irradiates high-energy ion beams on samples, and can be used for element analysis of the samples from the energy of backscattered ions, as well as the distribution of elements in the depth direction. Implanting ions with a maximum energy of 6.8 MeV into samples can be used for material processing. |
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The TEM is an apparatus used to observe and analyze microstructures of materials. This apparatus, Hitachi HF-2000, also can be used for EnergyDispersiveX-ray Spectroscopy (EDXS) and Electron Energy Loss Spectroscopy (EELS) of materials in the nanometer scale.
The electron beam fall down to the sample and the image was shown in screen on the display. |
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JAIST has 6 clean rooms where microfabrications such as the preparation of semiconductor IC devices are made. The level of clean room was defined as CLASS gnumberh of dusts with more than 0.1 micrometer-size. Especially JAIST has a clean room with an extremely-high level of CLASS 10. Our clean rooms have a wide window and silent systems for interior comfort and high security of experimenters. |
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