Title:
Microparticles separation using MEMS and Microfluidics

Speaker:
Burhanuddin Yeop Majlis
Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia (UKM)
43600 UKM Bangi,Selangor
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Abstract:
In this paper we present a simple, low cost fabrication of a microfilter and separation echnique using in different applications of Lab on Chip. Silicon MEMS is explored in microporous membrane fabrication, namely copperelectroplating and electrochemical etching (ECE) of silicon. In the first technique, a copper membrane with evenly distributed micropores was fabricated by electroplating the copper layer on the silicon nitride membrane, which was later removed to leave the freestanding microporous membrane structure. The second approach involves the thinning of bulk silicondown to a few micrometers thick using KOH and etching the resulting silicon membrane in 5% HF by ECE to create micropores. A UV-curing elastomeric polyurethane methacrylate (PUMA) for rapid prototyping of microfluidic devices is introduced. An elastomeric microfluidic device consisting of parallel arrays of pillars with mechanically tunable spacings is employed as an adjustable microfiltration platform. The tunable filtration system is used for finding the best conditions of separation of solid microbeads or deformable blood cells in a crossflow pillar-based method. The DEP with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution. The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry.

Keywords:
Lab-on-Chip, Microfluidics, PUMA, Microfilter, Micropores.


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