Title:
Towards High Switching Cycles of Suspended Graphene based Nanoelectromechanical Switch

Speaker(s):
Mohd Amir Zulkefli, Mohd Ambri Mohamed, Kim Shyong Siow, Burhanuddin Yeop Majlis

Institute of Microengineering and Nanoelectronics (IMEN), The National University of Malaysia (UKM), 43600 Bangi, Selangor, MALAYSIA

Abstract:
Graphene based Nanoelectromechanical (NEM) contact switch is an interesting component in electronic devices due to the unique electronic and mechanical properties of graphene. However, the reliability issue in term of switching cycles operation remains the main challenge for graphene based NEM contact switch. There are some attempts from previous researches to overcome this problem. In this research, the channel length and the gap height between the top electrode and the graphene beam are varied to realize the optimum aspect ratio and the effect on the cycles of switching operation is analyzed. The characteristics of the device will be investigated by using Optical Microscopy, Raman Spectroscopy, Atomic Force Microscopy, Field Emission Scanning Electron Microscopy and Semiconductor Analyzer System. This research expectation is to enhance the high switching cycles and low pull-in voltage with aspect ratio optimization.