Title:
CHARACTERIZATION OF GRAPHENE GROWTH ON INTERDIGITAL ELECTRODES OF MICRO SUPERCAPACITOR

Speaker(s):
Hafzaliza Erny Zainal Abidin, Azrul Azlan Hamzah, Mohd Ambri Mohamed and Burhanuddin Yeop Majlis

Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia (UKM)
43600 UKM Bangi,Selangor
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Abstract:
Micro supercapacitor has recently gained much interest in fields such as bioMEMS, biomedical implants, power electronic devices, high power applications and has promising capability to power small electronic devices. The structure of micro supercapacitor consists of SiO₂, Ni, Polypyrrole (Ppy), graphene and Polyvinyl Alcohol (PVA) layers. Recently, graphene is one of the carbon allotropes with honeycomb lattice has attracted a lot of interest due to its remarkable properties such as high electrical conductivity, good electrochemical stability and excellent mechanical behaviour. The objectives of the research is to design and development of a micro supercapacitor with direct growth of vertical aligned graphene on interdigital electrode via Plasma-Enhanced Chemical Vapor Deposition ( PECVD). The direct growth of vertical aligned graphene on interdigital electrodes by PECVD process for 10 minutes, temperature at 600ºC and power at 40W. The growth of graphene structure on interdigital electrode of micro supercapacitor was characterized by Scanning Electron Microscope (SEM), Field Emission Scanning Electron Microscopy (FESEM), Energy Dispersive X-Ray (EDX) ,Raman Spectroscopy and Atomic Force Microscopy (AFM). From FESEM and AFM images, it is suggested multilayer graphene grown on interdigital electrodes are in vertical orientation.